29 ¼” x 20” x 24” 19” x 6” Cabinet with wheels and side panels Wech 1374 vacuum pump NRC NH56 Series 6” diffusion pump VRC LP Series 6” vacuum valve Nor Cal KF40 SS Foreline Valve with Humphrey 310 Solenoid M/N ILVP-1502-NWB Nor Cal KF40 SS Rough Valve with Burke Actuator 1 Vent Valve Balzers KF-16 with ASCO redhat Actuator 1 NRC 703 manual/automatic valve controller 1 Varian BA2 senTorr vacuum gauge controller with two TC gauges and two ion gauge tubes 1 new Kurt Lesker Co G100K-PT 57mm ion gauge tube 1 Leybold Inficon XTM/2 deposition monitor with crystal sensor 2 Planetary Assembly 1 Retrofit for rotary cage; balzers motor drive, drive shaft, control 115v 1 Filament control with Electran 2 kVA and powerformer dry type transformer 2 Copper clamps and feedthrus