44″ Wide x 44″ deep x 48″ High with a round back sector of 22″ radius curvature.
Contains 5 plates planetary fixtures suspended from inside roof that holds 5 substrate holders planets of 15″ diameter with adjustable rails.
Water cooling and rotary motion drive to air temescal model STIH-270+-2M with four hearth electron beam sources 25cc diameter.
Airco Temescal CV-8 high voltage power supply.
Substrate heater system consist of 6 holders – reflectors fixture, each contain 5 quartz halogen lamps rated at 1000 watts power to the transformer
Primary is supply from a Payne model 18 ESW-2-80 three phase SCR power controllers rated at 32 KVA.
Pumping system is accomplished with a CTI Cryogenics, CRYO-TORR 500 vacuum pump.
CTI-Cryogenics – Kelvin temperature indicator.
Mechanical pump Leybold DK 200
270 Gauge controller Granville-Phillips
High voltage control model CV-8
Ionization gauge tube
Eddy – optical monitor LM-101
HP 7132A chart recorder
A test glass changer with a capacity to hold 30 test glass pieces is furnished for thickness monitoring