44″ Wide x 44″ deep x 48″ High with a round back sector of 22″ radius curvature.
Contains 5 plates planetary fixtures suspended from inside roof that holds 5 substrate holders planets of 15″ diameter with adjustable rails.
Water cooling and rotary motion drive to air temescal model STIH-270+-2M with four hearth electron beam sources 25cc diameter.
One thermal resistance connected to a transformer.
Airco Temescal CV-8 high voltage power supply.
Substrate heater system consist of 6 holders – reflectors fixture, each contain 5 quartz halogen lamps rated at 1000 watts power to the transformer
Primary is supply from a Payne model 18 ESW-2-80 three phase SCR power controllers rated at 32 KVA.
Pumping consists of a 20″ Varian HS-20 oil diffusion pump
Mechanical pump Leybold DK 200, Poly cold model 1100HC
Head crystal monitor, Sycon STM-100/MF thickness/rate monitor, 270 gauge controller Granville-Phillips
High voltage control model CV-8
XYZ -8 control, Eddy – optical monitor LM-101
HP 7132A chart recorder.
A test glass changer with a capacity to hold 30 test glass pieces is furnished for thickness monitoring