44″ Wide x 44″ deep x 57″ High Contains 3 plates planetary fixtures with an adjustable advantage like a rail type. Water cooling and rotary motion drive to air temescal model STIH-1 with four hearth electron beam sources 25cc diameter. Airco Temescal CV-8 high voltage power supply. Substrate heater system consist of 3 holders – reflectors fixture, each contain 6 quartz halogen lamps rated at 1000 watts power Pumping consists of a 20″ Varian HS-20 oil diffusion pump Mechanical pump Stokes model 212H-11 High voltage control model CV-8 Polycold model P-650 270 Gauge controller Granville – Phillips Eddy – optical monitor XYZ -8 control HP 7132A chart recorder. A test glass changer with a capacity to hold 30 test glass pieces is furnished for thickness monitoring